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BOC-Edwards Auto500 Thin Film Coating System
- FL500 Stainless steel box chamber: 500 mm diameter x 500 mm high, internal dimensions 433 mm x 402 mm
- Viewport: 100 mm diameter
- Chamber wall access ports: 1 x NW25, 1 x NW38CF
- Top plate access ports: 6 x NW25
- Workholder plate : 260 mm diameter
- Ultimate vacuum: 7 x 10^-7 mbar
- Pumpdown: 1 x 10^-5 mbar < 13 mins, 2 x 10^-6 mbar < 60 mins
- Vacuum pumping options: 600 l/s Diffusion pump with LN2
Manufacture Website |
